发明授权
US09000537B2 FinFET devices having recessed liner materials to define different fin heights
有权
FinFET器件具有凹陷的衬垫材料以限定不同的翅片高度
- 专利标题: FinFET devices having recessed liner materials to define different fin heights
- 专利标题(中): FinFET器件具有凹陷的衬垫材料以限定不同的翅片高度
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申请号: US14333683申请日: 2014-07-17
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公开(公告)号: US09000537B2公开(公告)日: 2015-04-07
- 发明人: Xiuyu Cai , Ruilong Xie , Kangguo Cheng , Ali Khakifirooz
- 申请人: Globalfoundries Inc. , International Business Machines Corporation
- 申请人地址: KY Grand Cayman US NY Armonk
- 专利权人: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- 当前专利权人: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- 当前专利权人地址: KY Grand Cayman US NY Armonk
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L29/78 ; H01L29/66
摘要:
One method includes performing an etching process through a patterned mask layer to form trenches in a substrate that defines first and second fins, forming liner material adjacent the first fin to a first thickness, forming liner material adjacent the second fin to a second thickness different from the first thickness, forming insulating material in the trenches adjacent the liner materials and above the mask layer, performing a process operation to remove portions of the layer of insulating material and to expose portions of the liner materials, performing another etching process to remove portions of the liner materials and the mask layer to expose the first fin to a first height and the second fin to a second height different from the first height, performing another etching process to define a reduced-thickness layer of insulating material, and forming a gate structure around a portion of the first and second fin.
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