Invention Grant
- Patent Title: Suspended membrane device
- Patent Title (中): 悬浮膜装置
-
Application No.: US13907708Application Date: 2013-05-31
-
Publication No.: US09000542B2Publication Date: 2015-04-07
- Inventor: Tien Choy Loh , Olivier Le Neel
- Applicant: STMicroelectronics Pte Ltd.
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd.
- Current Assignee: STMicroelectronics Pte Ltd.
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group PLLC
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L29/84 ; H01L31/058 ; B81B3/00 ; B81C1/00

Abstract:
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.
Public/Granted literature
- US20140353773A1 METHOD FOR FORMING A SUSPENDED MEMBRANE Public/Granted day:2014-12-04
Information query
IPC分类: