Invention Grant
- Patent Title: MEMS structure with adjustable ventilation openings
- Patent Title (中): 具有可调通风口的MEMS结构
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Application No.: US13531373Application Date: 2012-06-22
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Publication No.: US09002037B2Publication Date: 2015-04-07
- Inventor: Alfons Dehe , Matthias Herrmann , Ulrich Krumbein , Stefan Barzen , Wolfgang Klein , Wolfgang Friza , Martin Wurzer
- Applicant: Alfons Dehe , Matthias Herrmann , Ulrich Krumbein , Stefan Barzen , Wolfgang Klein , Wolfgang Friza , Martin Wurzer
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R3/00 ; B81B7/00 ; H04R7/18 ; H04R19/00
Abstract:
A MEMS structure includes a backplate, a membrane, and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.
Public/Granted literature
- US20130223023A1 MEMS Structure with Adjustable Ventilation Openings Public/Granted day:2013-08-29
Information query
