发明授权
- 专利标题: Method of making a silica crucible in a controlled atmosphere
- 专利标题(中): 在受控气氛中制造石英坩埚的方法
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申请号: US12623140申请日: 2009-11-20
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公开(公告)号: US09003832B2公开(公告)日: 2015-04-14
- 发明人: Katsuhiko Kemmochi , Thomas Kayser , Robert Joseph Coolich , Walter Lehmann
- 申请人: Katsuhiko Kemmochi , Thomas Kayser , Robert Joseph Coolich , Walter Lehmann
- 申请人地址: US WA Camas DE
- 专利权人: Heraeus Shin-Etsu America, Inc.,Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人: Heraeus Shin-Etsu America, Inc.,Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人地址: US WA Camas DE
- 代理机构: Marger Johnson & McCollom, P.C.
- 主分类号: C03B19/09
- IPC分类号: C03B19/09
摘要:
A silica crucible is made in a mold cavity of the type in which ambient atmosphere can be drawn through silica grain in the cavity. In one embodiment, a silica grain layer is formed in the mold cavity and gas, which may comprise helium, nitrogen, hydrogen, or a mixture thereof, is introduced into the mold cavity. The silica grain layer is heated while substantially no ambient atmosphere is drawn through the silica grain. Thereafter, at least a portion of the silica grain layer is fused while drawing ambient atmosphere through the silica grain. The gas displaces air in the mold cavity thereby reducing nitrogen oxides and ozone.
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