Invention Grant
US09003885B2 Tri-axis accelerometer having a single proof mass and fully differential output signals
有权
三轴加速度计具有单个检测质量和全差分输出信号
- Patent Title: Tri-axis accelerometer having a single proof mass and fully differential output signals
- Patent Title (中): 三轴加速度计具有单个检测质量和全差分输出信号
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Application No.: US13831040Application Date: 2013-03-14
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Publication No.: US09003885B2Publication Date: 2015-04-14
- Inventor: Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
- Applicant: Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01P15/09 ; G01P15/08 ; G01P15/12 ; G01P15/18
Abstract:
A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
Public/Granted literature
- US20140102194A1 TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS Public/Granted day:2014-04-17
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