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US09003885B2 Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
三轴加速度计具有单个检测质量和全差分输出信号

Tri-axis accelerometer having a single proof mass and fully differential output signals
摘要：
A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要（中）：

三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

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