- 专利标题: Method for manufacturing organic light-emitting device
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申请号: US13619390申请日: 2012-09-14
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公开(公告)号: US09006019B2公开(公告)日: 2015-04-14
- 发明人: Manabu Otsuka , Tomoyuki Hiroki
- 申请人: Manabu Otsuka , Tomoyuki Hiroki
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A. Inc., IP Division
- 优先权: JP2011-217662 20110930; JP2012-191771 20120831
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L51/00 ; H01L51/56 ; H01L27/32
摘要:
A method for manufacturing a light-emitting device includes a step of forming an etching resistant protection layer on a substrate provided with an organic planarizing layer, a step of forming a plurality of electrodes on the etching resistant protection layer, a step of forming an organic compound layer on the substrate provided with the plurality of electrodes, a step of forming a resist layer on the organic compound layer formed on parts of electrodes among the plurality of electrodes using a photolithographic method, and a step of removing the organic compound layer in a region not covered with the resist layer by dry etching, wherein an entire surface of the organic planarizing layer on the substrate on which steps up to the step of forming the plurality of electrodes have been performed is covered with at least one of the etching resistant protection layer and the electrode.
公开/授权文献
- US09054315B2 Method for manufacturing organic light-emitting device 公开/授权日:2015-06-09
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