发明授权
US09006027B2 Systems and methods for terminating junctions in wide bandgap semiconductor devices
有权
用于在宽带隙半导体器件中终止结的系统和方法
- 专利标题： Systems and methods for terminating junctions in wide bandgap semiconductor devices
- 专利标题（中）： 用于在宽带隙半导体器件中终止结的系统和方法
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申请号： US13610614申请日： 2012-09-11
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公开(公告)号： US09006027B2公开(公告)日： 2015-04-14
- 发明人: Zachary Matthew Stum , Ahmed Elasser , Stephen Daley Arthur , Stanislav I. Soloviev , Peter Almern Losee
- 申请人： Zachary Matthew Stum , Ahmed Elasser , Stephen Daley Arthur , Stanislav I. Soloviev , Peter Almern Losee
- 申请人地址： US NY Niskayuna
- 专利权人： General Electric Company
- 当前专利权人： General Electric Company
- 当前专利权人地址： US NY Niskayuna
- 代理商 Scott J. Asmus
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L31/0328 ; H01L29/06 ; H01L29/74 ; H01L29/87 ; H01L21/02 ; H01L29/73 ; H01L29/739 ; H01L29/16 ; H01L29/20
摘要：
An electrical device includes a blocking layer disposed on top of a substrate layer, wherein the blocking layer and the substrate layer each are wide bandgap semiconductors, and the blocking layer and the substrate layer form a buried junction in the electrical device. The device comprises a termination feature disposed at a surface of the blocking layer and a filled trench disposed proximate to the termination feature. The filled trench extends through the blocking layer to reach the substrate layer and is configured to direct an electrical potential associated with the buried junction toward the termination feature disposed near the surface of the blocking layer to terminate the buried junction.
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