Invention Grant
US09006352B2 Photosensitive alkali-soluble resin, method of preparing the same, and color photosensitive resist containing the same 有权
感光性碱溶性树脂及其制备方法和含有该光敏抗蚀剂的光敏抗蚀剂

Photosensitive alkali-soluble resin, method of preparing the same, and color photosensitive resist containing the same
Abstract:
Provided is a photosensitive alkali-soluble resin comprising a compound of formula (I), a method of preparing the same, and a color photosensitive resist containing the same, wherein n1, n2, R1, R2 and R3 are defined as herein. The photosensitive alkali-soluble resin is prepared by: copolymerizing ethylene oxide with α-hydroxyalkyl phenyl ketone to obtain the first intermediate product, followed by copolymerizing the first intermediate product with a copolymerization product of glycerin acrylate, styrene, and maleic anhydride to obtain the second intermediate product, and oxidizing the second intermediate product to produce the photosensitive alkali-soluble resin.
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