发明授权
- 专利标题： Vapor deposition apparatus and method, and method of manufacturing organic light emitting display apparatus
- 专利标题（中）： 蒸镀装置及其制造方法以及制造有机发光显示装置的方法
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申请号： US13356301申请日： 2012-01-23
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公开(公告)号： US09012257B2公开(公告)日： 2015-04-21
- 发明人: Sang-Joon Seo , Seung-Hun Kim , Jin-Kwang Kim , Seung-Yong Song
- 申请人： Sang-Joon Seo , Seung-Hun Kim , Jin-Kwang Kim , Seung-Yong Song
- 申请人地址： KR Yongin-si
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-si
- 代理机构： Christie, Parker & Hale, LLP
- 优先权： KR10-2011-0069487 20110713
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/458 ; C23C16/54 ; H01L51/56 ; C23C16/04 ; H01L51/00
摘要：
A vapor deposition apparatus, which is capable of performing a thin film deposition process and improving characteristics of a formed thin film, includes a chamber having an exhaust opening; a stage located in the chamber, and including a plurality of mounting surfaces on which the plurality of substrates may be mounted; and an injection unit having at least one injection opening for injecting a gas into the chamber in a direction parallel with surfaces of the plurality of substrates.
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