发明授权
- 专利标题: Pressure sensor with pressure-actuated switch
- 专利标题(中): 带压力开关的压力传感器
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申请号: US12985052申请日: 2011-01-05
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公开(公告)号: US09016133B2公开(公告)日: 2015-04-28
- 发明人: William Frederick Adrianus Besling , Peter Gerard Steeneken , Olaf Wunnicke
- 申请人: William Frederick Adrianus Besling , Peter Gerard Steeneken , Olaf Wunnicke
- 申请人地址: NL Eindhoven
- 专利权人: NXP, B.V.
- 当前专利权人: NXP, B.V.
- 当前专利权人地址: NL Eindhoven
- 主分类号: H01H35/34
- IPC分类号: H01H35/34 ; G01L19/12 ; G01L7/08 ; G01L9/00
摘要:
Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in response to a measured ambient pressure. The electrical contact may be separated from a signal path through a cavity formed using a sacrificial layer and PVD plugs. At one or more defined touch-point pressure thresholds, the membrane of the pressure sensor may deflect so that the state of contact between an electrical contact and one or more sections of a signal path may change. In some embodiments, the change of state may cause the pressure sensor to trigger an alarm in the electrical circuit. Various embodiments also enable the operation of the electrical circuit for testing and calibration through the use of one or more actuation electrode layers.
公开/授权文献
- US20120167659A1 PRESSURE SENSOR WITH PRESSURE-ACTUATED SWITCH 公开/授权日:2012-07-05
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