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US09016837B2 Ink jet printhead device with compressive stressed dielectric layer 有权
具有压应力介质层的喷墨打印头装置

Ink jet printhead device with compressive stressed dielectric layer
Abstract:
An ink jet printhead device includes a substrate and at least one first dielectric layer above the substrate. A resistive layer is above the at least one first dielectric layer. An electrode layer is above the resistive layer and defines first and second electrodes coupled to the resistive layer. At least one second dielectric layer is above the electrode layer and contacts the resistive layer through the at least one opening. The at least one second dielectric layer has a compressive stress magnitude of at least 340 MPa.
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