Invention Grant
US09019471B2 Maskless exposure apparatus and stitching exposure method using the same
有权
无掩模曝光装置和使用其的缝合曝光方法
- Patent Title: Maskless exposure apparatus and stitching exposure method using the same
- Patent Title (中): 无掩模曝光装置和使用其的缝合曝光方法
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Application No.: US13064679Application Date: 2011-04-08
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Publication No.: US09019471B2Publication Date: 2015-04-28
- Inventor: Jeong Min Kim , Sang Don Jang , Sang Woo Bae
- Applicant: Jeong Min Kim , Sang Don Jang , Sang Woo Bae
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2010-0040249 20100429
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20

Abstract:
Disclosed herein are a maskless exposure apparatus configured to perform exposure by tilting a beam spot array with respect to a scan direction (Y-axis direction) thus preventing stitching stripes and a stitching method using the same. A step distance, in which exposure dose uniformity in a stitching area is within a tolerance range, is calculated using actual position data of beam spots constituting the beam spot array on an exposure plane, and if necessary, using beam power data and/or beam size data. As exposure is performed based on image data conforming to the step distance, the stitching area has a uniform exposure dose, enabling exposure without stitching stripes.
Public/Granted literature
- US20110267594A1 Maskless exposure apparatus and stitching exposure method using the same Public/Granted day:2011-11-03
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