Invention Grant
- Patent Title: Method to extend single wavelength ellipsometer to obtain spectra of refractive index
- Patent Title (中): 扩展单波长椭偏仪以获得折射率光谱的方法
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Application No.: US13727854Application Date: 2012-12-27
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Publication No.: US09019483B2Publication Date: 2015-04-28
- Inventor: Guowen Ding , Brent Boyce , Mohd Fadzli Anwar Hassan , Minh Huu Le , Zhi-Wen Wen Sun , Yu Wang
- Applicant: Intermolecular Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: G01N21/41
- IPC: G01N21/41
Abstract:
Methods are provided to use data obtained from a single wavelength ellipsometer to determine the refractive index of materials as a function of wavelength for thin conductive films. The methods may be used to calculate the refractive index spectrum as a function of wavelength for thin films of metals, and conductive materials such as conductive metal nitrides or conductive metal oxides.
Public/Granted literature
- US20140185034A1 Method to Extend Single Wavelength Ellipsometer to Obtain Spectra of Refractive Index Public/Granted day:2014-07-03
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