发明授权
US09021700B2 Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus 有权
液体喷射头,液体喷射头和液体喷射装置的制造方法

Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus
摘要:
A method of manufacturing a liquid jet head comprises forming a terminal region on a top surface of an actuator substrate in the vicinity of a rear end thereof, and forming on the top surface a plurality of alternately arrayed ejection grooves and dummy grooves arranged in parallel to each other from a front end toward the terminal region. Shallow grooves are formed in the terminal region, and a conductive film is formed on the top surface, side surface and bottom surface of each of the ejection grooves, and on the side surface and bottom surface of the shallow grooves. The conductive film is removed from the top surface by grinding, and a cover plate is bonded to the actuator substrate so as to expose the terminal region and cover the ejection grooves. A nozzle plate is adhered to a side surface of the actuator substrate at which the ejection grooves are opened.
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