发明授权
US09021700B2 Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus
有权
液体喷射头,液体喷射头和液体喷射装置的制造方法
- 专利标题: Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus
- 专利标题(中): 液体喷射头,液体喷射头和液体喷射装置的制造方法
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申请号: US13846559申请日: 2013-03-18
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公开(公告)号: US09021700B2公开(公告)日: 2015-05-05
- 发明人: Osamu Koseki
- 申请人: SII Printek Inc.
- 申请人地址: JP
- 专利权人: SII Printek Inc.
- 当前专利权人: SII Printek Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP2012-091030 20120412
- 主分类号: B21D53/76
- IPC分类号: B21D53/76 ; B23P17/00 ; B41J2/045 ; B41J2/16 ; B29D99/00 ; B41J2/14
摘要:
A method of manufacturing a liquid jet head comprises forming a terminal region on a top surface of an actuator substrate in the vicinity of a rear end thereof, and forming on the top surface a plurality of alternately arrayed ejection grooves and dummy grooves arranged in parallel to each other from a front end toward the terminal region. Shallow grooves are formed in the terminal region, and a conductive film is formed on the top surface, side surface and bottom surface of each of the ejection grooves, and on the side surface and bottom surface of the shallow grooves. The conductive film is removed from the top surface by grinding, and a cover plate is bonded to the actuator substrate so as to expose the terminal region and cover the ejection grooves. A nozzle plate is adhered to a side surface of the actuator substrate at which the ejection grooves are opened.