发明授权
- 专利标题: Resistance variable memory structure and method of forming the same
- 专利标题(中): 电阻变量记忆结构及其形成方法
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申请号: US14015738申请日: 2013-08-30
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公开(公告)号: US09040951B2公开(公告)日: 2015-05-26
- 发明人: Fu-Ting Sung , Ching-Pei Hsieh , Chern-Yow Hsu , Shih-Chang Liu , Chia-Shiung Tsai
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L45/00
摘要:
A memory structure includes a first dielectric layer, having a first top surface, over a conductive structure. A first opening in the first dielectric layer exposes an area of the conductive structure, and has an interior sidewall. A first electrode structure, having a first portion and a second portion, is over the exposed area of the conductive structure. The second portion extends upwardly along the interior sidewall. A resistance variable layer is disposed over the first electrode. A second electrode structure, having a third portion and a fourth portion, is over the resistance variable layer. The third portion has a second top surface below the first top surface of the first dielectric layer. The fourth portion extends upwardly along the resistance variable layer. A second opening is defined by the second electrode structure. At least a part of a second dielectric layer is disposed in the second opening.
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