发明授权
US09042683B2 Optical modulator including graphene 有权
光调制器包括石墨烯

Optical modulator including graphene
摘要:
An optical modulator includes a first graphene and a second graphene on an upper surface of a semiconductor layer, a first electrode on the first graphene, and a second electrode on the second graphene. Respective side surfaces of the first graphene and the second graphene are separated from each other. A first ridge portion of the semiconductor layer and a second ridge portion on the second graphene constitute an optical waveguide, and the first and second graphenes are on a center portion of the optical waveguide in a vertical direction to the semiconductor.
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