发明授权
- 专利标题： Microwave plasma abatement apparatus
- 专利标题（中）： 微波等离子体消除装置
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申请号： US12085205申请日： 2006-09-25
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公开(公告)号： US09044707B2公开(公告)日： 2015-06-02
- 发明人: Marilena Radoiu , James Robert Smith , Andrew James Seeley
- 申请人： Marilena Radoiu , James Robert Smith , Andrew James Seeley
- 申请人地址： GB West Sussex
- 专利权人： Edwards Limited
- 当前专利权人： Edwards Limited
- 当前专利权人地址： GB West Sussex
- 代理机构： Shumaker & Sieffert, P.A.
- 优先权： GB0523947.0 20051124
- 国际申请： PCT/GB2006/003551 WO 20060925
- 国际公布： WO2007/060385 WO 20070531
- 主分类号： B01D53/32
- IPC分类号： B01D53/32 ; B01J19/12 ; B01D53/00
摘要：
In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.
公开/授权文献
- US20100038230A1 Microwave Plasma Abatement Apparatus 公开/授权日：2010-02-18