发明授权
- 专利标题： Transport system and set-up method
- 专利标题（中）： 运输系统和设置方法
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申请号： US13387300申请日： 2010-07-23
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公开(公告)号： US09048275B2公开(公告)日： 2015-06-02
- 发明人: Masanao Murata , Tatsuya Kumehashi
- 申请人： Masanao Murata , Tatsuya Kumehashi
- 申请人地址： JP Kyoto
- 专利权人： Murata Machinery, Ltd.
- 当前专利权人： Murata Machinery, Ltd.
- 当前专利权人地址： JP Kyoto
- 代理机构： Keating & Bennett, LLP
- 优先权： JP2009-176385 20090729
- 国际申请： PCT/JP2010/004719 WO 20100723
- 国际公布： WO2011/013338 WO 20110203
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/673
摘要：
In a transport system, a positioning hole is provided in an undersurface of a container. A positioning protrusion corresponding to the positioning hole of the container is provided on a first load port of a manufacturing device. When a transport vehicle places the container onto the first load port, the placement position of the container is established by having the positioning protrusion of the first load port fit into the positioning hole. A second load port different from the first load port of the manufacturing device is provided on a storage device. A positioning protrusion is not provided on the second load port. A slip prevention member is provided on an upper surface of the second load port.
公开/授权文献
- US20120128452A1 TRANSPORT SYSTEM AND SET-UP METHOD 公开/授权日：2012-05-24
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