发明授权
- 专利标题: CMOS device and method for manufacturing the same
- 专利标题(中): CMOS器件及其制造方法
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申请号: US13640733申请日: 2012-04-11
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公开(公告)号: US09049061B2公开(公告)日: 2015-06-02
- 发明人: Qiuxia Xu , Chao Zhao , Gaobo Xu
- 申请人: Qiuxia Xu , Chao Zhao , Gaobo Xu
- 申请人地址: unknown Beijing
- 专利权人: The Institute of Microelectronics Chinese Academy of Science
- 当前专利权人: The Institute of Microelectronics Chinese Academy of Science
- 当前专利权人地址: unknown Beijing
- 代理机构: Treasure IP Group
- 优先权: CN201210075694 20120321
- 国际申请: PCT/CN2012/000485 WO 20120411
- 国际公布: WO2013/138952 WO 20130926
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/265 ; H04L21/02
摘要:
This invention discloses a CMOS device, which includes: a first MOSFET; a second MOSFET different from the type of the first MOSFET; a first stressed layer covering the first MOSFET and having a first stress; and a second stressed layer covering the second MOSFET, wherein the second stressed layer is doped with ions, and thus has a second stress different from the first stress. This invention's CMOS device and method for manufacturing the same make use of a partitioned ion implantation method to realize a dual stress liner, without the need of removing the tensile stressed layer on the PMOS region or the compressive stressed layer on the NMOS region by photolithography/etching, thus simplifying the process and reducing the cost, and at the same time, preventing the stress in the liner on the NMOS region or PMOS region from the damage that might be caused by the thermal process of the deposition process.
公开/授权文献
- US20130249012A1 CMOS Device and Method for Manufacturing the Same 公开/授权日:2013-09-26
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