Invention Grant
- Patent Title: CMOS device and method for manufacturing the same
- Patent Title (中): CMOS器件及其制造方法
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Application No.: US13640733Application Date: 2012-04-11
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Publication No.: US09049061B2Publication Date: 2015-06-02
- Inventor: Qiuxia Xu , Chao Zhao , Gaobo Xu
- Applicant: Qiuxia Xu , Chao Zhao , Gaobo Xu
- Applicant Address: unknown Beijing
- Assignee: The Institute of Microelectronics Chinese Academy of Science
- Current Assignee: The Institute of Microelectronics Chinese Academy of Science
- Current Assignee Address: unknown Beijing
- Agency: Treasure IP Group
- Priority: CN201210075694 20120321
- International Application: PCT/CN2012/000485 WO 20120411
- International Announcement: WO2013/138952 WO 20130926
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/265 ; H04L21/02

Abstract:
This invention discloses a CMOS device, which includes: a first MOSFET; a second MOSFET different from the type of the first MOSFET; a first stressed layer covering the first MOSFET and having a first stress; and a second stressed layer covering the second MOSFET, wherein the second stressed layer is doped with ions, and thus has a second stress different from the first stress. This invention's CMOS device and method for manufacturing the same make use of a partitioned ion implantation method to realize a dual stress liner, without the need of removing the tensile stressed layer on the PMOS region or the compressive stressed layer on the NMOS region by photolithography/etching, thus simplifying the process and reducing the cost, and at the same time, preventing the stress in the liner on the NMOS region or PMOS region from the damage that might be caused by the thermal process of the deposition process.
Public/Granted literature
- US20130249012A1 CMOS Device and Method for Manufacturing the Same Public/Granted day:2013-09-26
Information query
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