Invention Grant
- Patent Title: Partially isolated Fin-shaped field effect transistors
- Patent Title (中): 部分隔离鳍状场效应晶体管
-
Application No.: US14036759Application Date: 2013-09-25
-
Publication No.: US09053965B2Publication Date: 2015-06-09
- Inventor: Hong He , Chiahsun Tseng , Chun-chen Yeh , Yunpeng Yin
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Vazken Alexanian
- Agent Ido Tuchman
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/66 ; H01L27/12 ; H01L21/8234 ; H01L21/84

Abstract:
A transistor device and a method for forming a fin-shaped field effect transistor (FinFET) device, with the channel portion of the fins on buried silicon oxide, while the source and drain portions of the fins on silicon. An example method includes receiving a wafer with a silicon layer electrically isolated from a silicon substrate by a buried oxide (BOX) layer. The BOX layer is in physical contact with the silicon layer and the silicon substrate. The method further comprises implanting a well in the silicon substrate and forming vertical sources and drains over the well between dummy gates. The vertical sources and drains extend through the BOX layer, fins, and a portion of the dummy gates.
Public/Granted literature
- US20140264603A1 PARTIALLY ISOLATED FIN-SHAPED FIELD EFFECT TRANSISTORS Public/Granted day:2014-09-18
Information query
IPC分类: