Invention Grant
- Patent Title: Apparatus and method for etching organic layer
- Patent Title (中): 蚀刻有机层的装置和方法
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Application No.: US14029296Application Date: 2013-09-17
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Publication No.: US09054342B2Publication Date: 2015-06-09
- Inventor: Yoshiaki Sakamoto , Nam Ha
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2013-0061260 20130529
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L51/56

Abstract:
Provided are an apparatus and method for etching an organic layer, in which an organic material deposited in a non-layer forming area of a substrate is etched. The apparatus includes an etching chamber; a plasma generator configured to supply plasma into the etching chamber; a stage disposed in the etching chamber and configured to support the substrate; and a mask configured to guide the plasma toward the non-pixel area.
Public/Granted literature
- US20140357087A1 APPARATUS AND METHOD FOR ETCHING ORGANIC LAYER Public/Granted day:2014-12-04
Information query
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