发明授权
US09059060B2 Image sensor including an image-sensing element region and logic circuit region and manufacturing method thereof
有权
图像传感器，包括图像感测元件区域和逻辑电路区域及其制造方法
- 专利标题： Image sensor including an image-sensing element region and logic circuit region and manufacturing method thereof
- 专利标题（中）： 图像传感器，包括图像感测元件区域和逻辑电路区域及其制造方法
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申请号： US13737069申请日： 2013-01-09
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公开(公告)号： US09059060B2公开(公告)日： 2015-06-16
- 发明人: Hiroshi Ohno , Osamu Fujii , Masataka Shiratsuchi , Yoshinori Honguh
- 申请人： Kabushiki Kaisha Toshiba
- 申请人地址： JP Tokyo
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2012-043391 20120229
- 主分类号： H01L31/00
- IPC分类号： H01L31/00 ; H01L27/146
摘要：
According to one embodiment, an image sensor includes an image-sensing element region formed by arranging a plurality of image-sensing elements on a semiconductor substrate, and a logic circuit region formed in a region different from the image-sensing element region on the substrate and including a plurality of gate patterns. Further, dummy gate patterns are formed with a constant pitch on the image-sensing element region.
公开/授权文献
- US20130221474A1 IMAGE SENSOR AND MANUFACTURING METHOD THEREOF 公开/授权日：2013-08-29
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