Invention Grant
- Patent Title: Method for producing synthetic quartz glass
- Patent Title (中): 生产合成石英玻璃的方法
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Application No.: US13684375Application Date: 2012-11-23
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Publication No.: US09061935B2Publication Date: 2015-06-23
- Inventor: Heinz Fabian
- Applicant: Heinz Fabian
- Applicant Address: DE Hanau
- Assignee: Heraeus Quarzglas GmbH & Co. KG
- Current Assignee: Heraeus Quarzglas GmbH & Co. KG
- Current Assignee Address: DE Hanau
- Agency: Tiajoloff and Kelly LLP
- Priority: DE102011119373 20111125
- Main IPC: C03B37/018
- IPC: C03B37/018 ; C03B37/014 ; C03B19/14

Abstract:
A method for producing synthetic quartz glass comprises providing a liquid SiO2 feedstock material containing mainly octamethylcyclotetrasiloxane D4, vaporizing the SiO2 feedstock material into a feedstock vapor, converting the feedstock vapor into SiO2 particles, depositing the SiO2 particles on a deposition surface while forming a porous SiO2 soot body. and vitrifying the SiO2 soot body while forming the synthetic quartz glass. To produce large—volume cylindrical soot bodies with outer diameters of more than 300 mm of improved material homogeneity. the liquid feedstock material contains additional components comprising hexarnethylcyciotrisilxane D3 and its linear homolog with a weight fraction mD3, dodecamethylcyclohexasiloxane D6 and its linear homolog with a weight fraction mD6, and tetradecamethylcycloheptasiloxane D7 and/or hexadecamethylcyclooctasiloxane D8 and its linear homologs with a weight fraction mD7+. The weight ratio mD3/mD6 is in a range between 0.5 and 500 and the weight fraction mD7+is at least 20 wt. ppm.
Public/Granted literature
- US20130133378A1 METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS Public/Granted day:2013-05-30
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