Invention Grant
US09063378B2 Photo alignment method, exposure system for performing the same and liquid crystal display panel manufactured by the same
有权
照相对准方法，用于进行相同的曝光系统和由其制造的液晶显示面板
- Patent Title: Photo alignment method, exposure system for performing the same and liquid crystal display panel manufactured by the same
- Patent Title (中): 照相对准方法，用于进行相同的曝光系统和由其制造的液晶显示面板
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Application No.: US13724482Application Date: 2012-12-21
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Publication No.: US09063378B2Publication Date: 2015-06-23
- Inventor: Jin-Soo Jung , Young-Gu Kim , Jun-Woo Lee , Baek-Kyun Jeon , Min-Sik Jung
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2012-0002042 20120106
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/32 ; G02F1/1337 ; G03F7/20
Abstract:
In a photo alignment method, a substrate and a mask are aligned so that the substrate is spaced apart from the mask by a predetermined gap. An organic layer is formed on the substrate. The mask has a transmission portion and a light blocking portion. Light is irradiated through the mask in a direction substantially parallel with an interface between the transmission portion and the light blocking portion of the mask. Polymer chains are formed on an upper portion of the organic layer. The polymer chains are aligned in an alignment direction toward an incident direction of the light. Locations of the substrate and the mask are sensed in real time. The mask is transported to a predetermined location with respect to the substrate based on the sensed locations of the substrate and the mask.
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