Invention Grant
US09070014B2 System, method and computer program product for defect detection based on multiple references
有权
基于多重参考的缺陷检测系统,方法和计算机程序产品
- Patent Title: System, method and computer program product for defect detection based on multiple references
- Patent Title (中): 基于多重参考的缺陷检测系统,方法和计算机程序产品
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Application No.: US13773535Application Date: 2013-02-21
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Publication No.: US09070014B2Publication Date: 2015-06-30
- Inventor: Moshe Amzaleg , Yehuda Cohen , Nir Ben-David Dodzin , Efrat Rozenman
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
A defect detection system for computerized detection of defects, the system including: an interface for receiving inspection image data including information of an analyzed pixel and of a plurality of reference pixels; and a processor, including: a differences analysis module, configured to: (a) calculate differences based on an inspected value representative of the analyzed pixel and on multiple reference values, each of which is representative of a reference pixel among the plurality of reference pixels; wherein the differences analysis module is configured to calculate for each of the reference pixels a difference between the reference value of the reference pixel and the inspected value; and (b) compute a representative difference value based on a plurality of the differences; and a defect analysis module, configured to determine a presence of a defect in the analyzed pixel based on the representative difference value.
Public/Granted literature
- US20140233844A1 SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION BASED ON MULTIPLE REFERENCES Public/Granted day:2014-08-21
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