发明授权
US09072464B2 Thermal flow sensor integrated circuit with low response time and high sensitivity
有权
热流量传感器集成电路，响应时间低，灵敏度高
- 专利标题： Thermal flow sensor integrated circuit with low response time and high sensitivity
- 专利标题（中）： 热流量传感器集成电路，响应时间低，灵敏度高
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申请号： US13379226申请日： 2010-07-16
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公开(公告)号： US09072464B2公开(公告)日： 2015-07-07
- 发明人: Jaap Roger Haartsen , Ronald Dekker , Pascal De Graaf , Nicolaas Johannes Anthonius Van Veen , Alphonsus Tarcisius Jozef Maria Schipper
- 申请人： Jaap Roger Haartsen , Ronald Dekker , Pascal De Graaf , Nicolaas Johannes Anthonius Van Veen , Alphonsus Tarcisius Jozef Maria Schipper
- 申请人地址： NL Eindhoven
- 专利权人： Koninklijke Philips N.V.
- 当前专利权人： Koninklijke Philips N.V.
- 当前专利权人地址： NL Eindhoven
- 优先权： EP09166078 20090722
- 国际申请： PCT/IB2010/053253 WO 20100716
- 国际公布： WO2011/010260 WO 20110127
- 主分类号： G01F1/68
- IPC分类号： G01F1/68 ; A61B5/11 ; A61B5/00 ; A61M15/00 ; G01P5/10 ; G01P5/12 ; G01P13/00 ; G08B21/04 ; A61M5/168 ; A61M16/00
摘要：
A thermal flow sensor integrated circuit for sensing flow in a channel based on temperature measurements, the integrated circuit having a temperature sensing element (30) on a front side of the integrated circuit arranged to face the channel, and a bond pad (60, 200) coupled electrically to the temperature sensing element, for making electrical contact off the integrated circuit, the bond pad being arranged to face away from the channel. By having the bond pad facing away from the channel, the space needed for the bond pad and any connections to it need not extend beyond the temperature sensing element and get in the way of the channel. Hence the temperature sensing element can be located closer to the channel or in the channel to enable measurements with better response time and sensitivity.