Invention Grant
US09073322B1 Electrostatic device improved membrane bonding 有权
静电装置改善膜结合

Electrostatic device improved membrane bonding
Abstract:
An electrostatic actuator array including a plurality of recesses within an actuator membrane and a method for forming same. In an embodiment, a width of each recess is wider than a width of each bonding feature of a plurality of bonding features, and each bonding feature extends into one of the recesses. In another embodiment, a width of each recess is narrower than a width of each bonding feature. In each embodiment, adhesive within the recesses bonds the membrane to the bonding feature. The recesses provide a flow path for the adhesive to reduce or prevent adhesive encroachment into an air chamber within which an actuator electrode is located.
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