发明授权
- 专利标题: Vibration gyro having bias correcting function
- 专利标题(中): 具有偏置校正功能的振动陀螺仪
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申请号: US13759929申请日: 2013-02-05
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公开(公告)号: US09074889B2公开(公告)日: 2015-07-07
- 发明人: Masahiro Tsugai , Akitaka Uchimura , Syuji Nakashita
- 申请人: MITSUBISHI PRECISION CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Precision Co., Ltd.
- 当前专利权人: Mitsubishi Precision Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Christie, Parker & Hale, LLP
- 优先权: JP2012-106638 20120508; JP2012-205750 20120919
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/5705 ; G01C19/574
摘要:
A vibration gyro having a structure for canceling a quadrature error generated by structural asymmetricity due to production tolerance and a means for correcting a bias value when an angular velocity is zero. In order to apply a counter torque to a sense mass for canceling the quadrature error, left correction comb electrodes are fixed to a substrate adjacent to a left drive mass, and comb electrodes opposed to the correction comb electrodes are arranged on an inner portion of a frame member which constitutes the left drive mass. By applying DC voltage to the correction electrodes, electrostatic force, for canceling the leakage rotational displacement of the sense mass generated when the input angular velocity is zero, is generated.
公开/授权文献
- US20130298670A1 VIBRATION GYRO HAVING BIAS CORRECTING FUNCTION 公开/授权日:2013-11-14
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