发明授权
- 专利标题: Exposure device, photo-mask, and method for manufacturing liquid crystal display
- 专利标题(中): 曝光装置,光掩模和液晶显示器的制造方法
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申请号: US13285789申请日: 2011-10-31
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公开(公告)号: US09075323B2公开(公告)日: 2015-07-07
- 发明人: Jun Woo Lee , Soo-Ryun Cho , Baek Kyun Jeon , Joo Seok Yeom , Suk Hoon Kang , Kyoung Tae Kim
- 申请人: Jun Woo Lee , Soo-Ryun Cho , Baek Kyun Jeon , Joo Seok Yeom , Suk Hoon Kang , Kyoung Tae Kim
- 申请人地址: KR Yongin
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin
- 代理机构: H.C. Park & Associates, PLC
- 优先权: KR10-2011-0063825 20110629
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
The present invention is directed to an exposure apparatus and photo-mask, and method for manufacturing liquid crystal display using the same. An exposure apparatus according to an exemplary embodiment of the present invention provides an exposure apparatus which includes: a first photo-mask comprising a plurality of transmission parts; and a second photo-mask comprising a plurality of transmission parts, the first photo-mask and the second photo-mask comprising an overlapping region where the first photo-mask and the second photo-mask are partially overlapped, wherein at least one transmission part included in at least one of the first photo-mask and the second photo-mask in the overlapping region comprises a semi-transmission section, and a transmittance of the semi-transmission section is greater than or equal to 0% and less than 100%.
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