发明授权
US09075414B2 Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control device
有权
压力控制装置,流量控制装置和具有用于压力控制装置的程序的记录介质,具有用于流量控制装置的程序的记录介质
- 专利标题: Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control device
- 专利标题(中): 压力控制装置,流量控制装置和具有用于压力控制装置的程序的记录介质,具有用于流量控制装置的程序的记录介质
-
申请号: US13935437申请日: 2013-07-03
-
公开(公告)号: US09075414B2公开(公告)日: 2015-07-07
- 发明人: Kotaro Takijiri
- 申请人: HORIBA STEC, Co., Ltd.
- 申请人地址: JP Kyoto-shi
- 专利权人: HORIBA STEC, Co., Ltd.
- 当前专利权人: HORIBA STEC, Co., Ltd.
- 当前专利权人地址: JP Kyoto-shi
- 代理机构: Alleman Hall McCoy Russell & Tuttle LLP
- 优先权: JP2012-149988 20120703
- 主分类号: F16K31/02
- IPC分类号: F16K31/02 ; G05D7/06 ; G05D16/20
摘要:
To provide a pressure control device that can prevent ringing and overshoot without changing gain even with a high gain setting, can quickly change pressure to a steady state even with a large set pressure value, and can equalize the time required from an initial to steady state regardless of the set pressure value, a valve control part is provided that includes an open degree operated amount output part that outputs an open degree operated amount based on a measured pressure value and a set pressure value, and a limiter part that sets an upper limit value of the open degree operated amount according to the set pressure value and that controls a pressure control valve by the open degree operated amount of the upper limit value when the open degree operated amount exceeds the upper limit value.
公开/授权文献
信息查询