发明授权
- 专利标题: Transmissive-reflective photocathode
- 专利标题(中): 透射反射光电阴极
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申请号: US13638124申请日: 2012-09-06
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公开(公告)号: US09076639B2公开(公告)日: 2015-07-07
- 发明人: Ivan Maleev
- 申请人: Ivan Maleev
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 国际申请: PCT/US2012/053870 WO 20120906
- 国际公布: WO2013/036576 WO 20130314
- 主分类号: H01J40/06
- IPC分类号: H01J40/06 ; G01J1/44 ; H01L27/146
摘要:
The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.
公开/授权文献
- US20130126705A1 TRANSMISSIVE-REFLECTIVE PHOTOCATHODE 公开/授权日:2013-05-23
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