Invention Grant
- Patent Title: Transmissive-reflective photocathode
- Patent Title (中): 透射反射光电阴极
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Application No.: US13638124Application Date: 2012-09-06
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Publication No.: US09076639B2Publication Date: 2015-07-07
- Inventor: Ivan Maleev
- Applicant: Ivan Maleev
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- International Application: PCT/US2012/053870 WO 20120906
- International Announcement: WO2013/036576 WO 20130314
- Main IPC: H01J40/06
- IPC: H01J40/06 ; G01J1/44 ; H01L27/146

Abstract:
The present invention includes a transmissive-reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.
Public/Granted literature
- US20130126705A1 TRANSMISSIVE-REFLECTIVE PHOTOCATHODE Public/Granted day:2013-05-23
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