Invention Grant
US09076701B2 Wafer supporting structure, intermediate structure of a semiconductor package including the wafer supporting structure 有权
晶片支撑结构,包括晶片支撑结构的半导体封装的中间结构

Wafer supporting structure, intermediate structure of a semiconductor package including the wafer supporting structure
Abstract:
A wafer supporting structure includes a supporting substrate for supporting a wafer, a release layer for detaching the wafer from the supporting substrate, and an adhesive layer for attaching the wafer to the supporting substrate.
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