发明授权
US09076829B2 Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing 有权
适用于在电子设备制造中传送基板的机器人系统,装置和方法

Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
摘要:
Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.
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