Invention Grant
- Patent Title: Fin pitch scaling and active layer isolation
- Patent Title (中): 鳍间距缩放和有源层隔离
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Application No.: US14011125Application Date: 2013-08-27
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Publication No.: US09076842B2Publication Date: 2015-07-07
- Inventor: Ajey Poovannummoottil Jacob , Murat Kerem Akarvardar , Steven John Bentley , Bartlomiej Jan Pawlak
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Wayne F. Reinke, Esq.
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/764 ; H01L29/78 ; H01L21/02

Abstract:
A first semiconductor structure includes a bulk silicon substrate and one or more original silicon fins coupled to the bulk silicon substrate. A dielectric material is conformally blanketed over the first semiconductor structure and recessed to create a dielectric layer. A first cladding material is deposited adjacent to the original silicon fin, after which the original silicon fin is removed to form a second semiconductor structure having two fins that are electrically isolated from the bulk silicon substrate. A second cladding material is patterned adjacent to the first cladding material to form a third semiconductor structure having four fins that are electrically isolated from the bulk silicon substrate.
Public/Granted literature
- US20150061014A1 FIN PITCH SCALING AND ACTIVE LAYER ISOLATION Public/Granted day:2015-03-05
Information query
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