发明授权
- 专利标题: Liquid ejection head and method for manufacturing the same
- 专利标题(中): 液体喷射头及其制造方法
-
申请号: US14295504申请日: 2014-06-04
-
公开(公告)号: US09079405B2公开(公告)日: 2015-07-14
- 发明人: Toshiaki Kurosu , Hiroto Komiyama , Jun Yamamuro , Yoshinori Tagawa , Takanobu Manabe
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2013-123747 20130612
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; B41J2/16
摘要:
A liquid ejection head chip includes a liquid ejection unit having a plurality of ejection orifices for ejecting a liquid, a flow path in communication with the ejection orifices, and an energy generating element that generates energy for ejecting the liquid, the liquid ejection unit being provided on an upper surface formed of a (100) surface of a silicon single-crystal substrate. The side surfaces in at least one of two combinations of opposing side surfaces of the substrate have (111) surfaces of silicon single crystal and the angles of the (111) surfaces relative to the (100) surface are supplementary to each other.
公开/授权文献
信息查询
IPC分类: