Invention Grant
US09082731B2 Manufacturing method of metal wire and thin transistor array panel, and organic light emitting diode display
有权
金属线和薄晶体管阵列面板的制造方法和有机发光二极管显示
- Patent Title: Manufacturing method of metal wire and thin transistor array panel, and organic light emitting diode display
- Patent Title (中): 金属线和薄晶体管阵列面板的制造方法和有机发光二极管显示
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Application No.: US14222275Application Date: 2014-03-21
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Publication No.: US09082731B2Publication Date: 2015-07-14
- Inventor: Su Yeon Yun , Dong Jin Son
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2013-0053237 20130510; KR10-2013-0146784 20131129
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10 ; H01L31/00 ; H01L27/32 ; H01L27/12
Abstract:
A manufacturing method of a wire including: forming a lower layer on a substrate; forming a middle layer on the lower layer; forming an upper layer on the middle layer; forming, exposing, and developing a photoresist layer on the upper layer to form a photoresist pattern; and etching the upper layer, the middle layer, and the lower layer by using the photoresist pattern as a mask to form a wire such that the upper layer covers an end of the middle layer.
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