Invention Grant
US09082875B2 Methods for normalizing strain in semicondcutor devices and strain normalized semiconductor devices 有权
半衰期器件和应变归一化半导体器件中应变的归一化方法

Methods for normalizing strain in semicondcutor devices and strain normalized semiconductor devices
Abstract:
A method of normalizing strain in semiconductor devices and normalized strain semiconductor devices. The method includes: forming first and second field effect transistors of an integrated circuit; forming a stress layer over the first and second field effect transistors, the stress layer inducing strain in channel regions of the first and second field effect transistors; and selectively thinning the stress layer over at least a portion of the second field effect transistor.
Information query
Patent Agency Ranking
0/0