Invention Grant
US09082875B2 Methods for normalizing strain in semicondcutor devices and strain normalized semiconductor devices
有权
半衰期器件和应变归一化半导体器件中应变的归一化方法
- Patent Title: Methods for normalizing strain in semicondcutor devices and strain normalized semiconductor devices
- Patent Title (中): 半衰期器件和应变归一化半导体器件中应变的归一化方法
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Application No.: US13647538Application Date: 2012-10-09
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Publication No.: US09082875B2Publication Date: 2015-07-14
- Inventor: Bruce Balch , Kerry Bernstein , John Joseph Ellis-Monaghan , Nazmul Habib
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Anthony J. Canale
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8238 ; H01L29/78

Abstract:
A method of normalizing strain in semiconductor devices and normalized strain semiconductor devices. The method includes: forming first and second field effect transistors of an integrated circuit; forming a stress layer over the first and second field effect transistors, the stress layer inducing strain in channel regions of the first and second field effect transistors; and selectively thinning the stress layer over at least a portion of the second field effect transistor.
Public/Granted literature
- US20130032894A1 METHODS FOR NORMALIZING STRAIN IN SEMICONDCUTOR DEVICES AND STRAIN NORMALIZED SEMICONDUCTOR DEVICES Public/Granted day:2013-02-07
Information query
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