Invention Grant
US09086431B2 Method of manufacturing a probe comprising a cantilever with a conduit
有权
一种制造探针的方法，其包括具有导管的悬臂
- Patent Title: Method of manufacturing a probe comprising a cantilever with a conduit
- Patent Title (中): 一种制造探针的方法，其包括具有导管的悬臂
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Application No.: US13978502Application Date: 2012-01-13
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Publication No.: US09086431B2Publication Date: 2015-07-21
- Inventor: Edin Sarajlic
- Applicant: Edin Sarajlic
- Applicant Address: NL Enschede
- Assignee: SmartTip B.V.
- Current Assignee: SmartTip B.V.
- Current Assignee Address: NL Enschede
- Agency: Shewchuk IP Services, LLC
- Agent Jeffrey D. Shewchuk
- Priority: NL1038521 20110114; NL1038570 20110208
- International Application: PCT/NL2012/000007 WO 20120113
- International Announcement: WO2012/096571 WO 20120719
- Main IPC: H01R43/00
- IPC: H01R43/00 ; G01R3/00 ; B81C1/00 ; B01L3/00
Abstract:
The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.
Public/Granted literature
- US20130305519A1 Method Of Manufacturing A Probe Comprising A Cantilever With A Conduit Public/Granted day:2013-11-21
Information query
