发明授权
- 专利标题: Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
- 专利标题(中): 投影曝光系统和相应投影曝光系统的应力调整操作方法
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申请号: US13590673申请日: 2012-08-21
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公开(公告)号: US09086637B2公开(公告)日: 2015-07-21
- 发明人: Bernhard Kneer , Markus Deguenther , Toralf Gruner
- 申请人: Bernhard Kneer , Markus Deguenther , Toralf Gruner
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102010002383 20100226
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/42 ; G03F7/20
摘要:
A projection exposure system and a method for operating a projection exposure system for microlithography with an illumination system are disclosed. The illumination system includes at least one variably adjustable pupil-defining element. The illumination stress of at least one optical element of the projection exposure system is determined automatically in the case of an adjustment of the at least one variably adjustable pupil-defining element. From the automatically determined illumination stress, the maximum radiant power of the light source is set or determined and/or in which an illumination system is provided with which different illumination settings can be made. Usage of the projection exposure system is recorded and, from the history of the usage, at least one state parameter of at least one optical element of the projection exposure system is determined.
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