Invention Grant
- Patent Title: Bipolar junction transistors with self-aligned terminals
- Patent Title (中): 具有自对准端子的双极结晶体管
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Application No.: US14593282Application Date: 2015-01-09
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Publication No.: US09087868B2Publication Date: 2015-07-21
- Inventor: Qizhi Liu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Agent Anthony J. Canale
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/735 ; G06F17/50 ; H01L29/06 ; H01L29/10

Abstract:
Device structures and design structures for a bipolar junction transistor. A semiconductor material layer is formed on a substrate and a mask layer is formed on the semiconductor material layer. The mask layer is patterned to form a plurality of openings to the semiconductor material layer. After the mask layer is formed and patterned, the semiconductor material layer is etched at respective locations of the openings to define a first trench, a second trench separated from the first trench by a first section of the semiconductor material layer defining a terminal of the bipolar junction transistor, and a third trench separated from the first trench by a second section of the semiconductor material layer defining an isolation pedestal. A trench isolation region is formed at a location in the substrate that is determined at least in part using the isolation pedestal as a positional reference.
Public/Granted literature
- US20150115399A1 BIPOLAR JUNCTION TRANSISTORS WITH SELF-ALIGNED TERMINALS Public/Granted day:2015-04-30
Information query
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