发明授权
- 专利标题： Variable capacitance device
- 专利标题（中）： 可变电容器件
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申请号： US14249890申请日： 2014-04-10
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公开(公告)号： US09087929B2公开(公告)日： 2015-07-21
- 发明人: Yoshihiro Konaka , Toshiya Kawate
- 申请人： Murata Manufacturing Co., Ltd.
- 申请人地址： JP Kyoto-fu
- 专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人地址： JP Kyoto-fu
- 代理机构： Studebaker & Brackett PC
- 优先权： JP2011-244139 20111108
- 主分类号： H01L29/93
- IPC分类号： H01L29/93 ; H01L21/00 ; H01G5/16 ; H01L49/02 ; B81C1/00 ; H01L23/64
摘要：
A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.
公开/授权文献
- US20140217552A1 VARIABLE CAPACITANCE DEVICE 公开/授权日：2014-08-07
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