Invention Grant
US09089268B2 Neural sensing device and method for making the same 有权
神经传感装置及其制作方法

Neural sensing device and method for making the same
Abstract:
The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion and a plurality of microprobes. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The conductive vias are disposed in the microprobes and electrically connected to the integrated circuit portion.
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