Invention Grant
- Patent Title: Sensor module and semiconductor chip
- Patent Title (中): 传感器模块和半导体芯片
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Application No.: US14100148Application Date: 2013-12-09
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Publication No.: US09090453B2Publication Date: 2015-07-28
- Inventor: Marc Fueldner , Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01L41/113 ; H04R19/01 ; B81B3/00

Abstract:
A sensor module and semiconductor chip. One embodiment provides a carrier. A semiconductor chip includes a first recess and a second recess and a main surface of the semiconductor chip. The semiconductor chip is mounted to the carrier such that the first recess forms a first cavity with the carrier and the second recess forms a second cavity with the carrier. The first cavity is in fluid connection with the second cavity.
Public/Granted literature
- US20140091408A1 SENSOR MODULE AND SEMICONDUCTOR CHIP Public/Granted day:2014-04-03
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