发明授权
US09091683B2 Method for fabricating a biosensor chip and the biosensor chip made thereby
有权
制造生物传感器芯片的方法和由此制造的生物传感器芯片
- 专利标题: Method for fabricating a biosensor chip and the biosensor chip made thereby
- 专利标题(中): 制造生物传感器芯片的方法和由此制造的生物传感器芯片
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申请号: US13854847申请日: 2013-04-01
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公开(公告)号: US09091683B2公开(公告)日: 2015-07-28
- 发明人: Kuan-Jiuh Lin , Chuen-Yuan Hsu
- 申请人: Kuan-Jiuh Lin , Chuen-Yuan Hsu
- 申请人地址: TW Taichung
- 专利权人: NATIONAL CHUNG-HSING UNIVERSITY
- 当前专利权人: NATIONAL CHUNG-HSING UNIVERSITY
- 当前专利权人地址: TW Taichung
- 代理机构: Holland & Hart LLP
- 优先权: TW98127852A 20090819
- 主分类号: G01N33/53
- IPC分类号: G01N33/53 ; B82Y5/00 ; B82Y15/00
摘要:
A method of fabricating a biosensor chip includes: forming at least one metallic layer on a transparent substrate to form a composite member; disposing the composite member in a vacuumed chamber, and introducing a gas into the vacuumed chamber; applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuumed chamber, and causing the microwave plasma to interact with the metallic layer so that the metallic layer is melted and formed into a plurality of metallic nanoparticles that are spaced apart from each other and that expose partially the surface of the transparent substrate; and disposing a receptor at the surface of the transparent substrate that is exposed among the metallic nanoparticles. A biosensor chip is also disclosed.
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