发明授权
US09091683B2 Method for fabricating a biosensor chip and the biosensor chip made thereby 有权
制造生物传感器芯片的方法和由此制造的生物传感器芯片

Method for fabricating a biosensor chip and the biosensor chip made thereby
摘要:
A method of fabricating a biosensor chip includes: forming at least one metallic layer on a transparent substrate to form a composite member; disposing the composite member in a vacuumed chamber, and introducing a gas into the vacuumed chamber; applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuumed chamber, and causing the microwave plasma to interact with the metallic layer so that the metallic layer is melted and formed into a plurality of metallic nanoparticles that are spaced apart from each other and that expose partially the surface of the transparent substrate; and disposing a receptor at the surface of the transparent substrate that is exposed among the metallic nanoparticles. A biosensor chip is also disclosed.
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