发明授权
- 专利标题: Wafer level package solder barrier used as vacuum getter
- 专利标题(中): 晶圆级封装焊锡屏障用作真空吸气剂
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申请号: US13939400申请日: 2013-07-11
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公开(公告)号: US09093444B2公开(公告)日: 2015-07-28
- 发明人: Roland W. Gooch , Buu Q. Diep , Adam M. Kennedy , Stephen H. Black , Thomas Allan Kocian
- 申请人: Raytheon Company
- 申请人地址: US MA Waltham
- 专利权人: RAYTHEON COMPANY
- 当前专利权人: RAYTHEON COMPANY
- 当前专利权人地址: US MA Waltham
- 代理机构: Lando & Anastasi, LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/544 ; H01L23/02 ; H01L23/06 ; H01L23/498 ; H01L21/768 ; B81B7/00 ; B81C1/00 ; H01L23/26 ; H01L27/146
摘要:
An electronic device and methods of manufacture thereof. One or more methods may include providing a lid wafer having a cavity and a surface surrounding the cavity and a device wafer having a detector device and a reference device. In certain examples, a solder barrier layer of titanium material may be deposited onto the surface of the lid wafer. The solder barrier layer of titanium material may further be activated to function as a getter. In various examples, the lid wafer and the device wafer may be bonded together using solder, and the solder barrier layer of titanium material may prevent the solder from contacting the surface of the lid wafer.
公开/授权文献
- US20150014854A1 WAFER LEVEL PACKAGE SOLDER BARRIER USED AS VACUUM GETTER 公开/授权日:2015-01-15
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