Invention Grant
US09097982B2 Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
有权
辐射系统，辐射收集器，辐射束调节系统，辐射系统光谱纯度滤波器和形成光谱纯度滤光片的方法
- Patent Title: Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
- Patent Title (中): 辐射系统，辐射收集器，辐射束调节系统，辐射系统光谱纯度滤波器和形成光谱纯度滤光片的方法
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Application No.: US12994930Application Date: 2009-05-05
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Publication No.: US09097982B2Publication Date: 2015-08-04
- Inventor: Vadim Yevgenyevich Banine , Wilhelmus Petrus De Boeij , Antonius Johannes Josephus Van Dijsseldonk , Erik Roelof Loopstra , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels
- Applicant: Vadim Yevgenyevich Banine , Wilhelmus Petrus De Boeij , Antonius Johannes Josephus Van Dijsseldonk , Erik Roelof Loopstra , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2009/055380 WO 20090505
- International Announcement: WO2009/144117 WO 20091203
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
A radiation system is configured to generate a radiation beam. The radiation system comprising a chamber that includes a radiation source configured to generate radiation, a radiation beam emission aperture, and a radiation collector configured to collect radiation generated by the source, and to transmit the collected radiation to the radiation beam emission aperture. The radiation collector includes a spectral purity filter configured to enhance a spectral purity of the radiation to be emitted via the aperture.
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