发明授权
- 专利标题： Lithographic apparatus having a liquid detection system
- 专利标题（中）： 具有液体检测系统的平版印刷设备
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申请号： US13685410申请日： 2012-11-26
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公开(公告)号： US09104117B2公开(公告)日： 2015-08-11
- 发明人: Bob Streefkerk , Johannes Jacobus Matheus Baselmans , Sjoerd Nicolaas Lambertus Donders , Christiaan Alexander Hoogendam , Jeroen Johannes Sophia Maria Mertens , Johannes Catharinus Hubertus Mulkens
- 申请人： Bob Streefkerk , Johannes Jacobus Matheus Baselmans , Sjoerd Nicolaas Lambertus Donders , Christiaan Alexander Hoogendam , Jeroen Johannes Sophia Maria Mertens , Johannes Catharinus Hubertus Mulkens
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F9/00
摘要：
In immersion lithography after exposure of a substrate is complete, a detector is used to detect any residual liquid remaining on the substrate and/or substrate table.
公开/授权文献
- US20130135595A1 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 公开/授权日：2013-05-30
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