Invention Grant
US09105436B2 Ion source having negatively biased extractor 有权
离子源具有负偏压提取器

Ion source having negatively biased extractor
Abstract:
A method of generating ions in a radiation generator includes emitting electrons from an active cathode and on a trajectory away from the active cathode, at least some of the electrons as they travel interacting with an ionizable gas to produce ions. The method also includes setting a potential of at least one extractor downstream of the active cathode such that the ions are attracted toward the at least one extractor.
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